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Focusing analysis of high numerical aperture (NA) objective lens

Focusing analysis of high numerical aperture (NA) objective lens

  • 2020-06-09
  • Views:0

Focusing analysis of high numerical aperture (NA) objective lens

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  • Categories:NEWS
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  • 2020-06-09
  • Views:0
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In this paper,
High NA objective lens is widely used in lithography, microscopy and other techniques. Therefore, it is very important to consider the vector properties of light in focusing simulation. VirtualLab makes ray tracing and field tracing analysis of such lenses very easy. The focal spot asymmetry caused by vector effect can be observed clearly by field tracing. Using camera detector and electromagnetic field detector can study the focusing region flexibly and comprehensively, thus deepening the understanding of vector effect.

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